Authors: SWINKELS GHPM STOFFELS E STOFFELS WW SIMONS N KROESEN GMW DEHOOG FJ

Citation: Ghpm. Swinkels et al., TREATMENT OF DUST PARTICLES IN AN RF PLASMA MONITORED BY MIE SCATTERING ROTATING COMPENSATOR ELLIPSOMETRY, Pure and applied chemistry, 70(6), 1998, pp. 1151-1156