Authors: NAFIS S IANNO NJ SYNDER PG MCGAHAN WA JOHS B WOOLLAM JA

Citation: S. Nafis et al., ELECTRON-CYCLOTRON-RESONANCE ETCHING OF SEMICONDUCTOR STRUCTURES STUDIED BY IN-SITU SPECTROSCOPIC ELLIPSOMETRY, Thin solid films, 233(1-2), 1993, pp. 253-255