Authors: Martinez, FL San Andres, E del Prado, A Martil, I Bravo, D Lopez, FJ

Citation: Fl. Martinez et al., Temperature effects on the electrical properties and structure of interfacial and bulk defects in Al/SiNx : H/Si devices, J APPL PHYS, 90(3), 2001, pp. 1573-1581

Authors: San Andres, E del Prado, A Martinez, FL Martil, I Bravo, D Lopez, FJ

Citation: E. San Andres et al., Rapid thermal annealing effects on the structural properties and density of defects in SiO2 and SiNx : H films deposited by electron cyclotron resonance, J APPL PHYS, 87(3), 2000, pp. 1187-1192