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Results:
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Results: 1
Gas-phase studies in inductively coupled fluorocarbon plasmas
Authors:
Schaepkens, M Martini, I Sanjuan, EA Li, X Oehrlein, GS Perry, WL Anderson, HM
Citation:
M. Schaepkens et al., Gas-phase studies in inductively coupled fluorocarbon plasmas, J VAC SCI A, 19(6), 2001, pp. 2946-2957
Risultati:
1-1
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