Authors: Burghardt, B Scheede, S Senczuk, R Kahlert, HJ

Citation: B. Burghardt et al., Ablation plume effects on high precision excimer laser-based micromachining, APPL PHYS A, 69, 1999, pp. S137-S140

Authors: Jasper, K Scheede, S Burghardt, B Senczuk, R Berger, P Kahlert, HJ Hugel, H

Citation: K. Jasper et al., Excimer laser beam homogenizer with low divergence, APPL PHYS A, 69, 1999, pp. S315-S318