Authors:
Michel, B
Bernard, A
Bietsch, A
Delamarche, E
Geissler, M
Juncker, D
Kind, H
Renault, JP
Rothuizen, H
Schmid, H
SchmidtWinkel, P
Stutz, R
Wolf, H
Citation: B. Michel et al., Printing meets lithography: Soft approaches to high-resolution patterning (vol 45, pg 697, 2001), IBM J RES, 45(6), 2001, pp. 870-870