Authors: Siemroth, P Schulke, T

Citation: P. Siemroth et T. Schulke, Copper metallization in microelectronics using filtered vacuum arc deposition - principles and technological development, SURF COAT, 133, 2000, pp. 106-113

Authors: Schulke, T Anders, A

Citation: T. Schulke et A. Anders, Velocity distribution of carbon macroparticles generated by pulsed vacuum arcs, PLASMA SOUR, 8(4), 1999, pp. 567-571

Authors: Schulke, T Anders, A

Citation: T. Schulke et A. Anders, Ion charge state distributions of alloy-cathode vacuum arc plasmas, IEEE PLAS S, 27(4), 1999, pp. 911-914