Authors:
Fedosenko, G
Korzec, D
Schwabedissen, A
Engemann, J
Braca, E
Kenny, JM
Citation: G. Fedosenko et al., Comparison of diamond-like carbon films synthesized by 2.45 GHz microwave and 13.56 MHz multi-jet radiofrequency plasma sources, DIAM RELAT, 10(3-7), 2001, pp. 920-926
Authors:
Fedosenko, G
Schwabedissen, A
Korzec, D
Engemann, J
Citation: G. Fedosenko et al., Diamond-like carbon film deposition by a 13.56 MHz hollow cathode RF-RF system using different precursor gases, SURF COAT, 142, 2001, pp. 693-697
Authors:
Schwabedissen, A
Brockhaus, A
Georg, A
Engemann, J
Citation: A. Schwabedissen et al., Determination of the gas-phase Si atom density in radio frequency discharges by means of cavity ring-down spectroscopy, J PHYS D, 34(7), 2001, pp. 1116-1121
Authors:
Schwabedissen, A
Soll, C
Brockhaus, A
Engemann, J
Citation: A. Schwabedissen et al., Electron density measurements in a slot antenna microwave plasma source bymeans of the plasma oscillation method, PLASMA SOUR, 8(3), 1999, pp. 440-447
Authors:
Brockhaus, A
Behle, S
Georg, A
Schwabedissen, A
Soll, C
Engemann, J
Citation: A. Brockhaus et al., Diagnostics of a chemically active, pulsed microwave plasma for depositionof quartz-like films, CONTR PLASM, 39(5), 1999, pp. 399-409