Authors: Park, SH Seo, BC Park, HD Yoon, G

Citation: Sh. Park et al., Film bulk acoustic resonator fabrication for radio frequency filter applications, JPN J A P 1, 39(7A), 2000, pp. 4115-4119

Authors: Park, SH Seo, BC Yoon, G Park, HD

Citation: Sh. Park et al., Two-step deposition process of piezoelectric ZnO film and its application for film bulk acoustic resonators, J VAC SCI A, 18(5), 2000, pp. 2432-2436