Authors:
Gierak, J
Mailly, D
Faini, G
Pelouard, JL
Denk, P
Pardo, F
Marzin, JY
Septier, A
Schmid, G
Ferre, J
Hydman, R
Chappert, C
Flicstein, J
Gayral, B
Gerard, JM
Citation: J. Gierak et al., Nano-fabrication with focused ion beams, MICROEL ENG, 57-8, 2001, pp. 865-875