Authors: Shamoun, B

Citation: B. Shamoun, Photomask patterning: the influence of substrate bulk heating on placementaccuracy, MICROEL ENG, 57-8, 2001, pp. 447-452

Authors: Shamoun, B Trost, D

Citation: B. Shamoun et D. Trost, Experimental and numerical investigations of photomask substrate heating due to electron beam patterning, MICROEL ENG, 53(1-4), 2000, pp. 291-294

Authors: Shamoun, B Beshbeeshy, ME Bonazza, R

Citation: B. Shamoun et al., Light extinction technique for void fraction measurements in bubbly flow, EXP FLUID, 26(1-2), 1999, pp. 16-26

Authors: Shamoun, B Engelstad, R Trost, D

Citation: B. Shamoun et al., Assessment of thermal loading-induced distortions in optical photomasks due to e-beam multipass patterning, J VAC SCI B, 16(6), 1998, pp. 3558-3562