Authors: Hopfe, V Sheel, DW Raisbeck, D Rivero, JM Graehlert, W Throl, O van Mol, AMB Spee, CIMA

Citation: V. Hopfe et al., NIR diode laser based process control for industrial CVD reactors, J PHYS IV, 11(PR3), 2001, pp. 1153-1159

Authors: Hopfe, V Sheel, DW Graehlert, W Throl, O

Citation: V. Hopfe et al., NIR laser diode and FTIR based process control for industrial CVD reactors, SURF COAT, 142, 2001, pp. 328-332