Authors: Momose, T Yoshida, H Sherverni, Z Ebina, T Tatenuma, K Ikushima, Y

Citation: T. Momose et al., Surface cleaning on aluminum for ultrahigh vacuum using supercritical fluid CO2 with H2O and NaCl as additives, J VAC SCI A, 17(4), 1999, pp. 1391-1393