Authors:
Mayer, TM
de Boer, MP
Shinn, ND
Clews, PJ
Michalske, TA
Citation: Tm. Mayer et al., Chemical vapor deposition of fluoroalkylsilane monolayer films for adhesion control in microelectromechanical systems, J VAC SCI B, 18(5), 2000, pp. 2433-2440