Authors: Wilson, RG Zavada, JM Cao, XA Singh, RK Pearton, SJ Guo, HJ Pennycock, SJ Fu, M Sekhar, JA Scarvepalli, V Shu, RJ Han, J Rieger, DJ Zolper, JC Abernathy, CR

Citation: Rg. Wilson et al., Redistribution and activation of implanted S, Se, Te, Be, Mg, and C in GaN, J VAC SCI A, 17(4), 1999, pp. 1226-1229