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Results:
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Results: 1
Substrate bias effect on amorphous hydrogenated carbon films deposited by filtered cathodic arc deposition
Authors:
Li, YW Chen, CF Shue, YB Yu, TC Chang, JJK
Citation:
Yw. Li et al., Substrate bias effect on amorphous hydrogenated carbon films deposited by filtered cathodic arc deposition, JPN J A P 1, 40(11), 2001, pp. 6574-6580
Risultati:
1-1
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