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Results:
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Results: 2
Efficient and robust algorithms for Monte Carlo and e-beam lithography simulation
Authors:
Ivin, VV Silakov, MV Vorotnikova, NV Resnick, DJ Nordquist, KN Siragusa, L
Citation:
Vv. Ivin et al., Efficient and robust algorithms for Monte Carlo and e-beam lithography simulation, MICROEL ENG, 57-8, 2001, pp. 355-360
CMOS and beyond
Authors:
Tsui, R Siragusa, L Goronkin, H
Citation:
R. Tsui et al., CMOS and beyond, CR AC S IV, 1(7), 2000, pp. 875-883
Risultati:
1-2
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