Authors: Tada, H Kumpel, AE Lathrop, RE Slanina, JB Nieva, P Zavracky, P Miaoulis, IN Wong, PY

Citation: H. Tada et al., Novel imaging system for measuring microscale curvatures at high temperatures, REV SCI INS, 71(1), 2000, pp. 161-167

Authors: Tada, H Kumpel, AE Lathrop, RE Slanina, JB Nieva, P Zavracky, P Miaoulis, IN Wong, PY

Citation: H. Tada et al., Thermal expansion coefficient of polycrystalline silicon and silicon dioxide thin films at high temperatures, J APPL PHYS, 87(9), 2000, pp. 4189-4193