Authors: Guckel, H Fischer, K Stiers, E Chaudhuri, B McNamara, S Ramotowski, M Johnson, ED Kirk, C

Citation: H. Guckel et al., Direct, high throughput LIGA for commercial applications: a progress report, MICROSYST T, 6(3), 2000, pp. 103-105

Authors: Fischer, K Chaudhuri, B Stiers, E Guckel, H

Citation: K. Fischer et al., Large area, cost effective X-ray masks for high energy photons, MICROSYST T, 6(3), 2000, pp. 117-120