Authors: SAMMELSELG V ROSENTAL A TARRE A NIINISTO L HEISKANEN K ILMONEN K JOHANSSON LS UUSTARE T

Citation: V. Sammelselg et al., TIO2 THIN-FILMS BY ATOMIC LAYER DEPOSITION - A CASE OF UNEVEN GROWTH AT LOW-TEMPERATURE, Applied surface science, 134(1-4), 1998, pp. 78-86

Authors: ROSENTAL A ADAMSON P GERST A KOPPEL H TARRE A

Citation: A. Rosental et al., ATOMIC LAYER DEPOSITION IN TRAVELING-WAVE REACTOR - IN-SITU DIAGNOSTICS BY OPTICAL REFLECTION, Applied surface science, 112, 1997, pp. 82-86