Citation: Te. Tiwald et al., OPTICAL DETERMINATION OF SHALLOW CARRIER PROFILES USING FOURIER-TRANSFORM INFRARED ELLIPSOMETRY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(1), 1998, pp. 312-315
Authors:
THOMPSON DW
DEVRIES MJ
TIWALD TE
WOOLLAM JA
Citation: Dw. Thompson et al., DETERMINATION OF OPTICAL ANISOTROPY IN CALCITE FROM ULTRAVIOLET TO MIDINFRARED BY GENERALIZED ELLIPSOMETRY, Thin solid films, 313, 1998, pp. 341-346
Authors:
TIWALD TE
THOMPSON DW
WOOLLAM JA
PAULSON W
HANCE R
Citation: Te. Tiwald et al., APPLICATION OF IR VARIABLE-ANGLE SPECTROSCOPIC ELLIPSOMETRY TO THE DETERMINATION OF FREE-CARRIER CONCENTRATION DEPTH PROFILES, Thin solid films, 313, 1998, pp. 661-666
Authors:
SCHUBERT M
FRANKE E
NEUMANN H
TIWALD TE
THOMPSON DW
WOOLLAM JA
HAHN J
Citation: M. Schubert et al., OPTICAL INVESTIGATIONS OF MIXED-PHASE BORON-NITRIDE THIN-FILMS BY INFRARED SPECTROSCOPIC ELLIPSOMETRY, Thin solid films, 313, 1998, pp. 692-696
Authors:
TIWALD TE
THOMPSON DW
WOOLLAM JA
PEPPER SV
Citation: Te. Tiwald et al., DETERMINATION OF THE MID-IR OPTICAL-CONSTANTS OF WATER AND LUBRICANTSUSING IR ELLIPSOMETRY COMBINED WITH AN ATR CELL, Thin solid films, 313, 1998, pp. 718-721
Authors:
FRANKE E
SCHUBERT M
HECHT JD
NEUMANN H
TIWALD TE
THOMPSON DW
YAO H
WOOLLAM JA
HAHN J
Citation: E. Franke et al., IN-SITU INFRARED AND VISIBLE-LIGHT ELLIPSOMETRIC INVESTIGATIONS OF BORON-NITRIDE THIN-FILMS AT ELEVATED-TEMPERATURES, Journal of applied physics, 84(1), 1998, pp. 526-532
Authors:
SCHUBERT M
RHEINLANDER B
FRANKE E
NEUMANN H
TIWALD TE
WOOLLAM JA
HAHN J
RICHTER F
Citation: M. Schubert et al., INFRARED OPTICAL-PROPERTIES OF MIXED-PHASE THIN-FILMS STUDIED BY SPECTROSCOPIC ELLIPSOMETRY USING BORON-NITRIDE AS AN EXAMPLE, Physical review. B, Condensed matter, 56(20), 1997, pp. 13306-13313
Authors:
FRANKE E
SCHUBERT M
NEUMANN H
TIWALD TE
THOMPSON DW
WOOLLAM JA
HAHN J
RICHTER F
Citation: E. Franke et al., PHASE AND MICROSTRUCTURE INVESTIGATIONS OF BORON-NITRIDE THIN-FILMS BY SPECTROSCOPIC ELLIPSOMETRY IN THE VISIBLE AND INFRARED SPECTRAL RANGE, Journal of applied physics, 82(6), 1997, pp. 2906-2911
Authors:
FRANKE E
NEUMANN H
SCHUBERT M
TIWALD TE
WOOLLAM JA
HAHN J
Citation: E. Franke et al., INFRARED ELLIPSOMETRY ON HEXAGONAL AND CUBIC BORON-NITRIDE THIN-FILMS, Applied physics letters, 70(13), 1997, pp. 1668-1670