Authors: YANG GR SOSS SR NASON TC MA XF COCOZIELLO A TONG BY ZHU YT DU J TJEW KF

Citation: Gr. Yang et al., AMORPHOUS SI-B FILMS - MICROSTRUCTURE AND ELECTRICAL-PROPERTIES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 1054-1062