Authors: OHTSU Y TOCHITANI G FUJITA H ZHANG JQ SETSUHARA Y MIYAKE S

Citation: Y. Ohtsu et al., MEASUREMENTS OF ION ENERGY-DISTRIBUTION FUNCTIONS IN AN RADIO-FREQUENCY PLASMA EXCITED WITH AN M=0 MODE HELICAL ANTENNA AND THIN-FILM PREPARATION, JPN J A P 1, 36(7B), 1997, pp. 4620-4624

Authors: NASSER M OHTSU Y TOCHITANI G FUJITA H

Citation: M. Nasser et al., POTENTIAL OSCILLATIONS IN AN ELECTRONEGATIVE PLASMA DRIVEN BY AN ASYMMETRY RF DISCHARGE, JPN J A P 1, 36(7B), 1997, pp. 4722-4727

Authors: IKUSHIMA T TOCHITANI G FUJITA H

Citation: T. Ikushima et al., LARGE-DIAMETER MICROWAVE SF6 PLASMA PRODUCTION WITH RING-SHAPED PERMANENT-MAGNETS, Journal of physics. D, Applied physics, 28(9), 1995, pp. 1851-1855