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Results: 1
EFFECT OF THERMAL CYCLING ON STRESSES IN THIN SILICON-NITRIDE AND SILICON-CARBIDE FILMS
Authors:
LIM CW TOH CC FU JK LAHIRI SK
Citation:
Cw. Lim et al., EFFECT OF THERMAL CYCLING ON STRESSES IN THIN SILICON-NITRIDE AND SILICON-CARBIDE FILMS, Journal of materials science letters, 15(24), 1996, pp. 2177-2179
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