Authors: TOKITOH S UCHIDA H UCHIDA H OKUNO Y LIU GL SAKAYA Y HIRASHITA N

Citation: S. Tokitoh et al., STUDIES OF CORROSIVE OUTGASSES FROM VIA HOLES USING THERMAL-DESORPTION SPECTROSCOPY, JPN J A P 1, 34(2B), 1995, pp. 1021-1025

Authors: HIRASHITA N TOKITOH S UCHIDA H

Citation: N. Hirashita et al., THERMAL-DESORPTION AND INFRARED STUDIES OF PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITED SIO FILMS WITH TETRAETHYLORTHOSILICATE, JPN J A P 1, 32(4), 1993, pp. 1787-1793