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THE STATUS OF DEEP X-RAY-LITHOGRAPHY IN THE UK FOR THE DEVELOPMENT OFPRECISION MICROSTRUCTURES
Authors: TOLFREE DWL
Citation: Dwl. Tolfree, THE STATUS OF DEEP X-RAY-LITHOGRAPHY IN THE UK FOR THE DEVELOPMENT OFPRECISION MICROSTRUCTURES, Microsystem technologies, 4(2), 1998, pp. 51-55
MICROFABRICATION USING SYNCHROTRON-RADIATION
Authors: TOLFREE DWL
Citation: Dwl. Tolfree, MICROFABRICATION USING SYNCHROTRON-RADIATION, Reports on progress in physics, 61(4), 1998, pp. 313-351
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