Citation: J. Bretagne et al., PLASMA-SURFACE INTERACTION MODELING OF DC REACTIVE MAGNETRON DISCHARGES, Surface & coatings technology, 97(1-3), 1997, pp. 611-617
Authors:
TRENNEPOHL W
BRETAGNE J
GOUSSET G
PAGNON D
TOUZEAU M
Citation: W. Trennepohl et al., MODELING OF AN AR-O-2 REACTIVE MAGNETRON DISCHARGE USED FOR DEPOSITION OF CHROMIUM-OXIDE, Plasma sources science & technology, 5(4), 1996, pp. 607-621