Authors: FUJIMAKI S MATSUMOTO H KOKAKU Y KITOH M TSUMITA N

Citation: S. Fujimaki et al., STRUCTURAL-ANALYSIS OF HYDROGENATED CARBON-FILMS OBTAINED BY REACTIVEDIRECT-CURRENT MAGNETRON SPUTTERING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(1), 1996, pp. 194-196