Authors: SUGITA Y IIDA S AOKI Y OKITSU K TSUNEDA M TAKENO H ABE T KAWATA H

Citation: Y. Sugita et al., OBSERVATION OF MICRODEFECTS IN AS-GROWN CZOCHRALSKI SILICON-CRYSTALS BY SYNCHROTRON-RADIATION TOPOGRAPHY, JPN J A P 2, 32(7B), 1993, pp. 120000971-120000973