Authors:
SUGITA Y
IIDA S
AOKI Y
OKITSU K
TSUNEDA M
TAKENO H
ABE T
KAWATA H
Citation: Y. Sugita et al., OBSERVATION OF MICRODEFECTS IN AS-GROWN CZOCHRALSKI SILICON-CRYSTALS BY SYNCHROTRON-RADIATION TOPOGRAPHY, JPN J A P 2, 32(7B), 1993, pp. 120000971-120000973