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PREPARATION OF P-TYPE SILICON FILMS BY PLASMA DECOMPOSITION OF A SIH4H2/BF3 GAS-MIXTURE/
Authors: KAKINUMA H MOHRI M TSURUOKA T
Citation: H. Kakinuma et al., PREPARATION OF P-TYPE SILICON FILMS BY PLASMA DECOMPOSITION OF A SIH4H2/BF3 GAS-MIXTURE/, Journal of applied physics, 74(7), 1993, pp. 4614-4619
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