Authors: Schuler, A Thommen, V Reimann, P Oelhafen, P Francz, G Zehnder, T Duggelin, M Mathys, D Guggenheim, R

Citation: A. Schuler et al., Structural and optical properties of titanium aluminum nitride films (Ti1-xAlxN), J VAC SCI A, 19(3), 2001, pp. 922-929