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Citation: V. Hopfe et al., NIR diode laser based process control for industrial CVD reactors, J PHYS IV, 11(PR3), 2001, pp. 1153-1159

Authors: Hopfe, V Sheel, DW Graehlert, W Throl, O

Citation: V. Hopfe et al., NIR laser diode and FTIR based process control for industrial CVD reactors, SURF COAT, 142, 2001, pp. 328-332

Authors: Hopfe, V Grahlert, W Throl, O

Citation: V. Hopfe et al., FTIR based process control for industrial reactors, J PHYS IV, 9(P8), 1999, pp. 995-1002