Authors: Gougousi, T Xu, YH Kidder, JN Rubloff, GW Tilford, CR

Citation: T. Gougousi et al., Process diagnostics and thickness metrology using in situ mass spectrometry for the chemical vapor deposition of W from H-2/WF6, J VAC SCI B, 18(3), 2000, pp. 1352-1363

Authors: Perkin, M Kuhler, R Riety, P Skrovanek, T Morris, EC Tilford, CR Ehrlich, CD Ooiwa, A Eichorn, G Jager, J Molinar, GF Bass, AH Gupta, AC

Citation: M. Perkin et al., Comparison of pressure standards in the range 10 kPa to 140 kPa (vol 35, pg 161, 1998), METROLOGIA, 36(2), 1999, pp. 160-160