Authors: Yamaguchi, T Ying, X Tokimasa, Y Nair, BN Sugawara, T Nakao, S

Citation: T. Yamaguchi et al., Reaction control of tetraethyl orthosilicate (TEOS)/O-3 and tetramethyl orthosilicate (TMOS)/O-3 counter diffusion chemical vapour deposition for preparation of molecular-sieve membranes, PHYS CHEM P, 2(19), 2000, pp. 4465-4469