Authors:
Hidalgo, H
Tristant, P
Denoirjean, A
Desmaison, J
Citation: H. Hidalgo et al., Microwave plasma enhanced CVD of aluminum oxide films: Influence of the deposition parameter on the films characteristics, J PHYS IV, 11(PR3), 2001, pp. 723-730
Authors:
Tristant, P
Ding, Z
Vinh, QBT
Hidalgo, H
Jauberteau, JL
Desmaison, J
Dong, C
Citation: P. Tristant et al., Microwave plasma enhanced CVD of aluminum oxide films: OES diagnostics andinfluence of the RF bias, THIN SOL FI, 390(1-2), 2001, pp. 51-58
Authors:
Ntsama-Etoundi, MC
Desmaison, J
Tristant, P
Tixier, C
Citation: Mc. Ntsama-etoundi et al., Remote microwave plasma enhanced chemical vapour deposition of alumina on metallic substrates, SURF COAT, 121, 1999, pp. 233-237