Authors: Trouiller, Y Didiergeorges, A Buffet, N Mourier, T Laviron, C Quere, Y

Citation: Y. Trouiller et al., Surface treatment validation of inorganic BARC on 0.25 mu m Non Volatile Memory technology, MICROEL ENG, 46(1-4), 1999, pp. 47-50

Authors: Trouiller, Y Buffet, N Mourier, T Schiavone, P Quere, Y

Citation: Y. Trouiller et al., 0.12 mu m optical lithography performances using an alternating deep UV phase shift mask, JPN J A P 1, 37(12B), 1998, pp. 6714-6717