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Results: 2
On the out-of-plane deformation of V-shaped micromachined beams
Authors: Tsou, CF Yin, HL Fang, WL
Citation: Cf. Tsou et al., On the out-of-plane deformation of V-shaped micromachined beams, J MICROM M, 11(2), 2001, pp. 153-159
The effect of residual stresses on the deformation of semi-circular micromachined beams
Authors: Tsou, CF Fang, WL
Citation: Cf. Tsou et Wl. Fang, The effect of residual stresses on the deformation of semi-circular micromachined beams, J MICROM M, 10(1), 2000, pp. 34-41
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