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Results:
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Results: 3
Reaction chemistry in the afterglow of an oxygen-helium, atmospheric-pressure plasma
Authors:
Jeong, JY Park, J Henins, I Babayan, SE Tu, VJ Selwyn, GS Ding, G Hicks, RF
Citation:
Jy. Jeong et al., Reaction chemistry in the afterglow of an oxygen-helium, atmospheric-pressure plasma, J PHYS CH A, 104(34), 2000, pp. 8027-8032
Tantalum etching with a nonthermal atmospheric-pressure plasma
Authors:
Tu, VJ Jeong, JY Schutze, A Babayan, SE Ding, G Selwyn, GS Hicks, RF
Citation:
Vj. Tu et al., Tantalum etching with a nonthermal atmospheric-pressure plasma, J VAC SCI A, 18(6), 2000, pp. 2799-2805
Etching polyimide with a nonequilibrium atmospheric-pressure plasma jet
Authors:
Jeong, JY Babayan, SE Schutze, A Tu, VJ Park, J Henins, I Selwyn, GS Hicks, RF
Citation:
Jy. Jeong et al., Etching polyimide with a nonequilibrium atmospheric-pressure plasma jet, J VAC SCI A, 17(5), 1999, pp. 2581-2585
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