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Results: 2
Plasma deposition of amorphous carbon films on copper
Authors:
Chiu, S Turgeon, S Terreaul, B Sarkissian, A
Citation:
S. Chiu et al., Plasma deposition of amorphous carbon films on copper, THIN SOL FI, 359(2), 2000, pp. 275-282
Characterization of hydrogenated amorphous carbon films produced by plasma-enhanced chemical vapour deposition with various chemical hybridizations
Authors:
Bourgoin, D Turgeon, S Ross, GG
Citation:
D. Bourgoin et al., Characterization of hydrogenated amorphous carbon films produced by plasma-enhanced chemical vapour deposition with various chemical hybridizations, THIN SOL FI, 357(2), 1999, pp. 246-253
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