Authors: EDWARDS H MCGLOTHLIN R U E

Citation: H. Edwards et al., VERTICAL METROLOGY USING SCANNING-PROBE MICROSCOPES - IMAGING DISTORTIONS AND MEASUREMENT REPEATABILITY, Journal of applied physics, 83(8), 1998, pp. 3952-3971

Authors: EDWARDS H MCGLOTHLIN R SANMARTIN R U E GRIBELYUK M MAHAFFY R SHIH CK LIST RS UKRAINTSEV VA

Citation: H. Edwards et al., SCANNING CAPACITANCE SPECTROSCOPY - AN ANALYTICAL TECHNIQUE FOR PN-JUNCTION DELINEATION IN SI DEVICES, Applied physics letters, 72(6), 1998, pp. 698-700