Authors: Lee, YS Upadhyaya, K Nordheden, KJ Kao, MY

Citation: Ys. Lee et al., Selective reactive ion etching of GaAs/AlAs in BCl3/SF6 for gate recess, J VAC SCI B, 18(5), 2000, pp. 2505-2508

Authors: Nordheden, KJ Upadhyaya, K Lee, YS Gogineni, SP Kao, MY

Citation: Kj. Nordheden et al., GaAs etch rate enhancement with SF6 addition to BCl3 plasmas, J ELCHEM SO, 147(10), 2000, pp. 3850-3852