Authors:
Monaghan, ML
Nigam, T
Houssa, M
De Gendt, S
Urbach, HP
de Bokx, PK
Citation: Ml. Monaghan et al., Characterization of silicon oxynitride films by grazing-emission X-ray fluorescence spectrometry, THIN SOL FI, 359(2), 2000, pp. 197-202
Citation: C. Kok et Hp. Urbach, On the regularization of the inverse laplace transform in grazing-emissionX-ray fluorescence spectroscopy, INVERSE P E, 7(5), 1999, pp. 433-470