Authors:
Ushiro, T
Tsuji, D
Fukushima, A
Moriga, T
Nakabayashi, I
Murayama, K
Tominaga, K
Citation: T. Ushiro et al., Structural variation of thin films deposited from Zn3In2O6 target by RF-sputtering, MATER RES B, 36(5-6), 2001, pp. 1075-1082
Authors:
Tominaga, K
Murayama, T
Umezu, N
Mori, I
Ushiro, T
Moriga, T
Nakabayashi, I
Citation: K. Tominaga et al., Properties of films of multilayered ZnO : Al and ZnO deposited by an alternating sputtering method, THIN SOL FI, 344, 1999, pp. 160-163
Authors:
Tominaga, K
Umezu, N
Mori, I
Ushiro, T
Moriga, T
Nakabayashi, I
Citation: K. Tominaga et al., Transparent conductive ZnO film preparation by alternating sputtering of ZnO : Al and Zn or Al targets, THIN SOL FI, 334(1-2), 1998, pp. 35-39