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Authors: VILLALVILLA JM SANTOS C VALLESABARCA JA

Citation: Jm. Villalvilla et al., GALLIUM-ARSENIDE ETCHING USING ION-BEAMS FROM HYDROGEN METHANE MIXTURES/, Vacuum, 47(1), 1996, pp. 39-44

Authors: VILLALVILLA JM SANTOS C VALLESABARCA JA

Citation: Jm. Villalvilla et al., BOMBARDMENT ANGLE DEPENDENCE OF REACTIVE ION-BEAM ETCHING OF GAAS WITH CH4 H-2/, Vacuum, 45(10-11), 1994, pp. 1113-1114