Authors: VAMVAKAS VE DAVAZOGLOU D VAHLAS C

Citation: Ve. Vamvakas et al., THERMODYNAMIC STUDY, COMPOSITIONAL AND ELECTRICAL CHARACTERIZATION OFLPCVD SIO2-FILMS GROWN FROM TEOS N2O MIXTURES/, Microelectronics and reliability, 38(2), 1998, pp. 265-269

Authors: DAVAZOGLOU D VAMVAKAS VE VAHLAS C

Citation: D. Davazoglou et al., THERMODYNAMIC STUDY, COMPOSITION, AND MICROSTRUCTURE OF LOW-PRESSURE CHEMICAL-VAPOR-DEPOSITED SILICON DIOXIDE FILMS GROWN FROM TEOS N2O MIXTURES/, Journal of the Electrochemical Society, 145(4), 1998, pp. 1310-1317