Authors: VARTANIAN M YOUNGMAN R GIBSON D DRUMHELLER J FRANKEL R

Citation: M. Vartanian et al., POLYCAPILLARY COLLIMATOR FOR POINT-SOURCE PROXIMITY X-RAY-LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 3003-3007