Authors: PIERRAT C DEMARCO J VELLA RM VAIDYA S ROLFSON B JOHNSON JC

Citation: C. Pierrat et al., REPAIR OF PHASE-SHIFTING MASK DEFECTS USING A NOVEL PLANARIZATION TECHNIQUE WITH CONVENTIONAL BLANKS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(5), 1994, pp. 3057-3059