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Citation: Vc. Venezia et al., DEPTH PROFILING OF VACANCY CLUSTERS IN MEV-IMPLANTED SI USING AU LABELING, Applied physics letters, 73(20), 1998, pp. 2980-2982

Authors: AGARWAL A HAYNES TE VENEZIA VC HOLLAND OW EAGLESHAM DJ

Citation: A. Agarwal et al., EFFICIENT PRODUCTION OF SILICON-ON-INSULATOR FILMS BY COIMPLANTATION OF HE+ WITH H+, Applied physics letters, 72(9), 1998, pp. 1086-1088

Authors: ROTH EG HOLLAND OW VENEZIA VC NIELSEN B

Citation: Eg. Roth et al., METHODS OF DEFECT-ENGINEERING SHALLOW JUNCTIONS FORMED BY B-IMPLANTATION IN SI(), Journal of electronic materials, 26(11), 1997, pp. 1349-1354