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Results: 1
HYDROGEN PASSIVATION CAUSED BY SOFT SPUTTER ETCH CLEANING OF SI
Authors:
VERCAEMST AS VANMEIRHAEGHE RL LAFLERE WH CARDON F
Citation:
As. Vercaemst et al., HYDROGEN PASSIVATION CAUSED BY SOFT SPUTTER ETCH CLEANING OF SI, Solid-state electronics, 38(5), 1995, pp. 983-987
Risultati:
1-1
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